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Product Information(1)

Lithography Process Materials

  • An extremely pure product, developed utilizing technological expertise and experience accumulated over a number of years in the product areas of fine glass, fine chemicals, and fine ceramics.
  • Offering the most advanced stepper lens materials and photomask substrates with outstanding features such as low expansion, high optical transmission at deep ultraviolet wavelengths, and high chemical durability.

Synthetic Quartz Glass for Semiconductor Industry Optics

Synthetic quartz for exposure lens systems for integrated circuit manufacturing

Synthetic Quartz Glass for Photomask Substrates

Synthetic quartz photomask substrates

High Purity Silicon Carbide Components

  • An extremely pure material for equipment used in the heating processes of semi-conductor production. It enables drawing and manufacturing of equipment for large-sized wafers, and supports traditional horizontal and vertical furnaces.
  • To accommodate miniaturization of semi-conductor preprocessing that has advanced to the nano level, AGC promotes the development of technologies that further enhance purity and increase the precision of processing techniques.

High Purity Silicon Carbide ComponentsHigh Purity Silicon Carbide ComponentsHigh Purity Silicon Carbide ComponentsHigh Purity Silicon Carbide ComponentsHigh Purity Silicon Carbide Components

High purity silicon carbide components

Coating Materials

  • An extremely low-dielectric coating resin, used mainly as an interlayer dielectric for chemical compound semi-conductor layers and for packages.
  • With its features that offer excellent surface planarity and high adhesion to surface material, it can be used as a gap filler or a bonding (heat-resistant adhesive) material, and it can also be easily applied by spin coating.

Coating Materials

CMP Slurry

  • By taking advantage of the ability to handle the full production cycle, i.e. from raw material grinding to slurry, AGC offers a “slurry and polishing solution” that accommodates customers’ design policies and CMP processes.
  • By utilizing technologies fostered thus far for grind drawing and  for chemical reaction control, AGC optimizes slurries for oxide layers, wiring layers, and other layers. Consequently, all slurries offer excellent surface planarity, a high removal rate, and minimal scratching.

Polishing using CMP slurry for copper interconnects

Characteristic of AGC slurry for copper CMP process

CMP slurry

CMP slurry

CMP process

CMP process

Wafer after CMP processing

Wafer after CMP processing

Optical Filter for PDP

  • An optical function filter, developed using AGC’s original core fluorochemical and surface processing technologies that offers composite functions including color and brightness correction, electromagnet shielding, near infrared ray shielding, and low reflection.
  • Fluorochemical, one of AGC's core tecnologies have been applied to anti-reflection films, which make up optical function filters and which are attached to both sides of semi-tempered glass.

Optical Filter for PDP

Optical performance filter functions

Frit Paste for PDP

  • By taking advantage of its expertise in glass composition design and research analysis, AGC expands application of highly functional electronic materials in displays and electronic parts. Amid diversifying societal needs, AGC has established a system that enables the company to meet various customer needs in all stages including product planning, product design, manufacturing, and quality enhancement.
  • AGC proactively promotes the lead-free frit and paste. AGC has developed a substitute material to free frit and paste. AGC has developed a substitute material to replace lead, a key element in low-heating processes.

Frit Paste for PDP

Backlight Tube for LCD

  • CCFLs (Cold Cathode Fluorescent Lamps), which are used mainly as light sources for backlights to achieve the desired level of quality, have been developed utilizing superior technologies in melting and forming processes.
  • AGC’s backlight glass bulbs are environmentally friendly, with absolutely no arsenic, antimony, or other harmful substances included. Given the recent increased interest in environmental matters, they have been highly appraised.

Backlight Tube for LCD

About the AGC Group